Optical constants of crystalline WO3 deposited by magnetron sputtering

Crystalline WO3-x is an infrared (IR) electrochromic material having possib le applications in satellite thermal control and IR switches. Optical const ants of electrochromic materials change upon ion intercalation, usually wit h H+ or Li+. Of primary concern for device design are the optical constants in both the intercalated and deintercalated states. In situ and ex situ el lipsometric data are used to characterize both the deposition process and t he optical constants of the films. Ex situ data from a UV-Vis-NIR ellipsome ter are combined with data from a mid-infrared Fourier-transform-infrared-b ased ellipsometer to provide optical constants over a spectral range of 0.0 31-6.1 eV. (C) 1999 American Vacuum Society. [S0734-2101(99)04905-2].