The photochromic properties of sputtered amorphous tungsten oxide (a-WO3-x)
films have been studied. The a-WO3-x films, prepared under different oxyge
n partial pressures, were irradiated with ultraviolet (UV) light at room te
mperature, and the transmission decrease of the films was measured. We used
ellipsometry for the first time with and without UV irradiation to extract
the optical indices n and k of magnetron direct-current sputtered films in
the VIS/IR wavelength region. We have applied for the first time the Cauch
y-Lorentz model for simulating the photochromic properties of the irradiate
d a-WO3-x films. The results are consistent with previous reports showing t
hat oxygen deficiency is very important in determining the photochromic pro
perties of the a-WO3-x films. (C) 1999 American Vacuum Society. [S0734-2101
(99)03105-X].