Recommended practices for measuring the performance and characteristics ofclosed-loop gaseous helium cryopumps

Authors
Welch, KM Andeen, B de Rijke, JE Foster, CA Hablanian, MH Longsworth, RC Millikin, WE Sasaki, YT Tzemos, C
Citation
Km. Welch et al., Recommended practices for measuring the performance and characteristics ofclosed-loop gaseous helium cryopumps, J VAC SCI A, 17(5), 1999, pp. 3081-3095
Citations number
17
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
17
Issue
5
Year of publication
1999
Pages
3081 - 3095
Database
ISI
SICI code
0734-2101(199909/10)17:5<3081:RPFMTP>2.0.ZU;2-C
Abstract
This article establishes a set of uniform procedures for quantitatively cha racterizing closed-loop gaseous helium cryopumps. Topics include a listing of technical definitions and hardware illustrations of cryopumps; safety co nsiderations in the use of cryopumps; methods and procedures for determinin g the speed, ultimate pressure, capacity, cool-down time, impulsive gas loa d tolerance, regeneration time, thermal radiation tolerance, and maximum th roughput tolerance of cryopumps; and, a method of measuring the vibration c haracteristics of cryopumps. (C) 1999 American Vacuum Society. [S0734-2101( 99)06405-2].