Metrology of VLSI critical element sizes

Authors
Novikov, YA Rakov, AV
Citation
Ya. Novikov et Av. Rakov, Metrology of VLSI critical element sizes, MEAS TECH R, 42(1), 1999, pp. 20-26
Citations number
16
Categorie Soggetti
Instrumentation & Measurement
Journal title
MEASUREMENT TECHNIQUES
ISSN journal
05431972 → ACNP
Volume
42
Issue
1
Year of publication
1999
Pages
20 - 26
Database
ISI
SICI code
0543-1972(199901)42:1<20:MOVCES>2.0.ZU;2-8
Abstract
Methods are surveyed for measuring the critical dimensions of VLSI componen ts. The General Physics Institute of the Russian Academy of Sciences has de veloped a method that meets the requirements for metrological support up to the year 2010 as set out in the National Technology Roadmap for Semiconduc tors of the USA.