Sh. Kim et al., PREPARATION OF PB(ZR0.52TI0.48)O-3 THIN-FILMS ON PT RUO2 DOUBLE ELECTRODE BY A NEW SOL-GEL ROUTE/, Journal of materials research, 12(6), 1997, pp. 1576-1581
Pb(Zr0.52Ti0.48)O-3 (PZT) thin film on Pt/RuO2 double electrode was su
ccessfully prepared by using a new alkoxide-alkanolamine, sol-gel meth
od. It was observed that the use of Pt/RuO2 double electrode reduced l
eakage current, resulting in a marked improvement in the leakage chara
cteristics and more reliable capacitors. Typical P-E hysteresis behavi
or was observed even at low applied voltage of 5 V, manifesting greatl
y improved remanence and coercivity, Fatigue and breakdown characteris
tics, measured at 5 V, showed stable behavior, and no degradation in p
olarization was observed up to 10(11) cycles.