PREPARATION OF PB(ZR0.52TI0.48)O-3 THIN-FILMS ON PT RUO2 DOUBLE ELECTRODE BY A NEW SOL-GEL ROUTE/

Citation
Sh. Kim et al., PREPARATION OF PB(ZR0.52TI0.48)O-3 THIN-FILMS ON PT RUO2 DOUBLE ELECTRODE BY A NEW SOL-GEL ROUTE/, Journal of materials research, 12(6), 1997, pp. 1576-1581
Citations number
13
Categorie Soggetti
Material Science
ISSN journal
08842914
Volume
12
Issue
6
Year of publication
1997
Pages
1576 - 1581
Database
ISI
SICI code
0884-2914(1997)12:6<1576:POPTOP>2.0.ZU;2-F
Abstract
Pb(Zr0.52Ti0.48)O-3 (PZT) thin film on Pt/RuO2 double electrode was su ccessfully prepared by using a new alkoxide-alkanolamine, sol-gel meth od. It was observed that the use of Pt/RuO2 double electrode reduced l eakage current, resulting in a marked improvement in the leakage chara cteristics and more reliable capacitors. Typical P-E hysteresis behavi or was observed even at low applied voltage of 5 V, manifesting greatl y improved remanence and coercivity, Fatigue and breakdown characteris tics, measured at 5 V, showed stable behavior, and no degradation in p olarization was observed up to 10(11) cycles.