Sputtering by excitonic and elastic processes from solid neon by He ion bombardment

Authors
Pedrys, R Warczak, B Leskiewicz, P Schou, J Ellegaard, O
Citation
R. Pedrys et al., Sputtering by excitonic and elastic processes from solid neon by He ion bombardment, NUCL INST B, 157(1-4), 1999, pp. 121-125
Citations number
20
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
157
Issue
1-4
Year of publication
1999
Pages
121 - 125
Database
ISI
SICI code
0168-583X(199908)157:1-4<121:SBEAEP>2.0.ZU;2-X
Abstract
Sputtering of solid neon by keV He+ ions and 13.2 keV electrons has been st udied. We have measured the energy distributions of neon atoms emitted from neon during bombardment by these particles. The ion-induced distributions show features from knockon (elastic) as well as electronic (inelastic) sput tering processes. The electronic components have been identified on the bas is of the distribution from electron impact. (C) 1999 Elsevier Science B.V. All rights reserved.