It is established theoretically and experimentally that in certain temperat
ure and composition ranges the solid solutions InGaAsP comprise a system of
strained, alternating (in mutually perpendicular directions [100] and [010
]) domains of a solid solution with two different compositions and differen
t lattice constants. The domains are clearly seen at the surface of an epit
axial film and wash out into its depth in the direction of the substrate. T
he data obtained most likely show spinodal decomposition of InGaAsP solid s
olutions in the experimental samples. (C) 1999 American Institute of Physic
s. [S1063-7826(99)02209-7].