Twenty keV Li+ was implanted at room temperature into p- and n-conducting s
ingle crystalline CuInSe2 at fluences of 3.2 x 10(15) and 3.2 x 10(16) cm(-
2), respectively. The lithium depth profiles were measured using the neutro
n depth profiling technique. The diffusional deviation of the profiles from
the ballistic expectation was simulated by a numerical computer calculatio
n. From these examinations it is concluded that
(a) lithium suffers considerable radiation-enhanced mobility during the imp
lantation process,
(b) the radiation-enhanced Li diffusion depends somewhat on the conductivit
y state of CuInSe2,
(c) the radiation-enhanced Li diffusion decreases with increasing implantat
ion fluence,
(d) whereas at the lower fluence, Li shows some thermal mobility, the latte
r is negligible after high fluence implantation.
The diffusional redistribution can be described in all cases reasonably wel
l by depth independent diffusion without trapping, and insofar differs from
previous examinations of hydrogen in CuInSe2. (C) 1999 Elsevier Science B.
V. All rights reserved.