Citation
N. Vershinin et al., Hall current accelerator for pre-treatment of large area glass sheets, THIN SOL FI, 351(1-2), 1999, pp. 190-193
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090
→ ACNP
Volume
351
Issue
1-2
Year of publication
1999
Pages
190 - 193
Database
ISI
SICI code
0040-6090(19990830)351:1-2<190:HCAFPO>2.0.ZU;2-J
Abstract
A large aperture Hall current accelerator has been developed for cleaning g
lass sheets before vacuum are deposition of decorative layers. Hall current
source advantages towards Kaufman's one in industrial processes are emphas
ized. Source 'sputter profiles' are given for silica glass and poly(methyl
metacrylate). Sputter cleaning of aluminum has been characterized in terms
of roughness and microhardness variation. (C) 1999 Elsevier Science S.A. Al
l rights reserved.