K. Koumoto et al., Micropatterning of titanium dioxide on self-assembled monolayers using a liquid-phase deposition process, CHEM MATER, 11(9), 1999, pp. 2305
The fabrication of micropatterned TiO2 films on deep UV patterned self-asse
mbled monolayers (SAMs) of phenylsiloxane is described. The patterned SAM w
as immersed in an acidic, aqueous TiF62- solution to directly deposit cryst
alline TiO2 (anatase) onto both hydrophobic (masked) and hydrophilic (irrad
iated) surface regions without the need for postdeposition heat curing. Sub
sequent sonication selectively removed weakly bound TiO2 present in the hyd
rophobic regions, resulting in a micropatterned TiO2 thin film.