New polarized electromagnetic actuators as integrated mechatronic components - design and application

This paper presents an overview over the computer-aided design process of m echatronic devices and systems, especially the design of electrodynamic and electromagnetic drives using modern high-energy permanent magnetic materia ls like NdFeB and SmCo. This paper also presents some examples of such actu ators. The first example is a miniaturized pneumatic valve for industrial a pplications. This valve has an integrated hi-stable polarized solenoid actu ator. The second example is a polarized electromagnetic valve manufactured by modern batch technologies using photo-structurable glass material. The v alve seat and the actuator coils are realized using this glass material. Th e third example is a gripping device with compliant mechanism and planar mo ving coil actuator. (C) 1999 Elsevier Science Ltd. All rights reserved.