Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Authors
Ayras, P Rantala, JT Levy, R Descour, MR Honkanen, S Peyghambarian, H
Citation
P. Ayras et al., Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask, THIN SOL FI, 352(1-2), 1999, pp. 9-12
Citations number
8
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090 → ACNP
Volume
352
Issue
1-2
Year of publication
1999
Pages
9 - 12
Database
ISI
SICI code
0040-6090(19990908)352:1-2<9:MSISTF>2.0.ZU;2-Y
Abstract
Multilevel structures in sol-gel thin films with a single step process are demonstrated. A negative-tone hybrid sol-gel material is UV-exposed through a gray-scale calibration mask. Test strips of different depths and a conti nuous test profile are demonstrated. A maximum depth difference exceeding 1 .5 mu m is obtained, which permits the fabrication of multilevel diffractiv e elements for use in visible light. This method of using sol-gel material with a gray-scale mask has the potential for low-cost fabrication of comple x multilevel micro-optical structures. (C) 1999 Elsevier Science S.A. All r ights reserved.