AES - ENERGY CALIBRATION OF ELECTRON SPECTROMETERS .3. GENERAL CALIBRATION

The energy calibration of Auger electron spectrometers in the direct s pectral mode is considered, in detail, partly on the basis of our earl ier reference work. The shift in the peak positions for the Cu M2,3VV, Au N6,7VV, Ag M4,5VV, Cu L3VV, AlKL2,3L2,3 and Au M4,5N6,7N6,7 peaks, as a function of spectrometer resolution in the n(E) and En(E) spectr a, are all analysed and described by polynomial functions. The calcula tions are Valid for spectrometers with Gaussian lineshapes for resolut ions in the range 0 to 0.7% and are based on reference data recorded w ith a spectrometer resolution of 0.25 eV using both 5 keV and 10 keV e nergy electron beams. The Al KL2,3L2,3 peak energy has been added to a ssist those with less sensitive spectrometers, where the Au M5N6,7N6,7 peak is weak, or where the spectrometer scale only reaches to 2000 eV . Additionally, the position of the Au M5N6,7N6,7 peak has been establ ished with greater accuracy than previously. The use of the Cu M2,3VV and Au M5N6,7N6,7 peaks removes the need for relativistic corrections for most practical spectrometers used in the kinetic energy range 0-25 00 eV. Crown copyright (C) 1997 Published by Elsevier Science B.V.