The development and application of imaging EXAFS spectromicroscopy

The capability to perform absorption spectroscopy with hard x-rays was adde d to the synchrotron imaging spectromicroscopy technique. We present severa l successful test cases. First, the EXAFS (extended x-ray absorption fine s tructure) analysis was implemented in areas as small as few mu m(2) for tra nsition-metal K edge absorption spectra. The corresponding structural infor mation was complemented by chemical information from the near-edge region. Specifically, in the case of a cross-sectional cut steel different Fe oxida tion states were found at different depths. Tests on a PVD grown TiN film r evealed areas with oxidized Ti. Overall, these tests demonstrate the feasib ility of combining structural and chemicals analysis with hard x ray absorp tion and high lateral resolution.