A numerical study of a collision-dominated inductively coupled plasma using particle-in-cell/Monte Carlo simulation

The deposition of power into electrons and ions in a collision-dominated in ductively coupled plasma has been investigated in Ar in a cylindrical react or wound uniformly around it which has ribbon-shaped current coil using par ticle-in-cell/Monte Carlo simulations. Electrons obtain energy from the tem porally varying induced azimuthal field, while heavy ions are only slightly heated by the electrostatic radial field caused by a wall sheath in front of the reactor wall.