Two-dimensional modeling of spatiotemporal structure of inductively coupled plasma

An inductively coupled plasma (ICP) is one of the candidates for a high den sity, large area and uniform plasma source for use in plasma processing eve n under low pressure conditions. We have developed a two-dimensional and ti me dependent model for a collision dominated ICP, taking into consideration electron transport in both the electric and magnetic fields, based on the relaxation continuum (RCT) model in a self-consistent manner. The 2D-space and time structure of an ICP, driven by a frequency of 13.56 MHz and a curr ent amplitude of 10 A at 0.3 Torr in Ar is mainly discussed. In particular, a space potential with a double frequency time variation, at a plasma dens ity of 10(11) cm(-3) is clarified as well as a potential distribution of th e insulating wall. of ICP. The importance of the power deposition by E-r x B-z drift of electrons in front of the side wall, in addition to E-theta dr ift is pointed out in terms of the plasma maintenance.