Signal propagation characteristics in polyimide optical wave-guide with micro-mirrors for optical multichip module

In order to develop key technologies far a multichip module with optical in terconnection, a test module using polyimide optical waveguides (POWs) with micro-mirrors and a photodiode array was successfully fabricated. Through the fabrication of this test module, we developed such basic technologies a s POW formation, vertical optical coupling with micro-mirrors buried in POW s, chip bonding with copper bumps, and so on. The signal propagation in POW s was characterized by the detection of vertical output signals at micro-mi rrors. From these characteristics, the transmission loss caused by passing a mirror was evaluated to be 0.16 dB.