The integrated ferroelectric/semiconductor systems, Pb(Zr0.53Ti0.47)O-3 (PZ
T)/SiO2/Si have been prepared and investigated. It was found that an asymme
try related to the conduction type of the substrate (Si) and the polarizati
on direction of PZT exists in the polarization-voltage loops of the integra
ted system. According to the configuration and the characteristic of the in
tegrated structure, we suggest that the space charge layer in Si and the tu
nneling process between Si and PZT during the polarization are the main cau
ses for this asymmetry. (C) 1999 American Institute of Physics. [SS0021-897
9(99)07420-4].