T. Munakata et I. Tanasawa, Study on silicon melt convection during the RF-FZ crystal growth process II. numerical investigation, J CRYST GR, 206(1-2), 1999, pp. 27-36
Silicon melt convection during the floating zone (FZ) crystal growth proces
s under radio-frequency (RF) heating and the effect of the externally appli
ed magnetic field on the RF-FZ silicon melt convection have been investigat
ed numerically. The main purpose of the study is to clarify the characteris
tics of the silicon melt convection under the RF heating and the effect of
externally applied magnetic field on such melt convection. The numerically
obtained flow characteristics are almost the same as previously reported ex
perimental results. Further, the fluctuation of melt convection disappears
when an external vertical magnetic held is applied. The required minimum ma
gnetic flux density to suppress the convection fluctuation is around 0.2 T.
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