Quantitative metallography by electron backscattered diffraction

Although electron backscattered diffraction (EBSD) in the scanning electron microscope is used mainly to investigate the relationship between local te xtures and microstructures, the technique has now developed to the stage wh ere it requires serious consideration as a tool for routine quantitative ch aracterization of microstructures. This paper examines the application of E BSD to the characterization of phase distributions, grain and subgrain stru ctures and also textures, Comparisons are made with the standard methods of quantitative metallography and it is shown that in many cases EBSD can pro duce more accurate and detailed measurements than the standard methods and that the data may sometimes be obtained more rapidly. The factors which cur rently limit the use of EBSD for quantitative microstructural characterizat ion, including the speed of data acquisition and the angular and spatial re solutions, are discussed, and future developments are considered.