Fault localisation in ICs by goniometric laser probing of thermal induced surface waves

New methods for fault detection in ICs are needed due to new technological trends. The detection of heat generated by faults offers interesting perspe ctives in this respect. Periodic heat released at the surface or inside ICs generates a surface thermal wave that can be detected by appropriate laser probing at distances up to 500 mu m from the source. We propose in this pa per a goniometric laser probing method allowing the determination of the di rection and distance of a fault with respect to the probing point. (C) 1999 Elsevier Science Ltd. All rights reserved.