Fault localisation in ICs by goniometric laser probing of thermal induced surface waves

Citation
S. Dilhaire et al., Fault localisation in ICs by goniometric laser probing of thermal induced surface waves, MICROEL REL, 39(6-7), 1999, pp. 919-923
Citations number
3
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS RELIABILITY
ISSN journal
00262714 → ACNP
Volume
39
Issue
6-7
Year of publication
1999
Pages
919 - 923
Database
ISI
SICI code
0026-2714(199906/07)39:6-7<919:FLIIBG>2.0.ZU;2-K
Abstract
New methods for fault detection in ICs are needed due to new technological trends. The detection of heat generated by faults offers interesting perspe ctives in this respect. Periodic heat released at the surface or inside ICs generates a surface thermal wave that can be detected by appropriate laser probing at distances up to 500 mu m from the source. We propose in this pa per a goniometric laser probing method allowing the determination of the di rection and distance of a fault with respect to the probing point. (C) 1999 Elsevier Science Ltd. All rights reserved.