Gold removal in failure analysis of GaAs-based laser diodes

Authors
Vanzi, M Bonfiglio, A Salaris, P Deplano, P Trogu, EF Serpe, A Salmini, G De Palo, R
Citation
M. Vanzi et al., Gold removal in failure analysis of GaAs-based laser diodes, MICROEL REL, 39(6-7), 1999, pp. 1043-1047
Citations number
4
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
MICROELECTRONICS RELIABILITY
ISSN journal
00262714 → ACNP
Volume
39
Issue
6-7
Year of publication
1999
Pages
1043 - 1047
Database
ISI
SICI code
0026-2714(199906/07)39:6-7<1043:GRIFAO>2.0.ZU;2-E
Abstract
A great improvement of EBIC images on GaAs-based aged laser diodes is obtai ned by removing the gold metallization from the top surface. Gold removal, on the other hand, is troublesome and unreliable on aged devices, both unde r the chemical (I/KI) or mechanical (peeling) approach. A new etch is prese nted, reliable for gold dissolution even on aged structures, and selective towards GaAs and its compounds. (C) 1999 Elsevier Science Ltd. All rights r eserved.