Developments in X-ray and astronomical CCD imagers

There have been many recent developments in the attributes and capabilities of silicon-based CCD detectors for use in space and ground-based astronomy . The imagers used as X-ray detectors require very low noise and excellent quantum efficiency over the energy range of 200-10 000 eV. This is achieved using a combination of front and back-illuminated imagers fabricated on a 5000 Omega-cm resistivity material. A requirement for ground-based imagers is very good sensitivity between 350 and 1000 nm, as well as low noise and a high degree of spatial uniformity. We will describe the fabrication and p erformance of these imagers. Special features integrated into the CCD pixel architecture have increased the capability of the imagers. A fast electron ic shutter has been developed for a wavefront sensor in an adaptive optics system. An orthogonal transfer CCD has been designed to compensate for the image motion relative to the CCD focal plane. Also, an antiblooming drain p rocess has been developed so bright sources do not extend spatially into ad jacent pixels in back- and front-illuminated imagers. Aspects of the design , fabrication, and performance of imagers with these features will be descr ibed. (C) 1999 Published by Elsevier Science B.V. All rights reserved.