Citation
M. Ukibe et al., Characteristics of Ti films for transition-edge sensor microcalorimeters, NUCL INST A, 436(1-2), 1999, pp. 256-261
Citations number
4
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT
ISSN journal
01689002
→ ACNP
Volume
436
Issue
1-2
Year of publication
1999
Pages
256 - 261
Database
ISI
SICI code
0168-9002(19991021)436:1-2<256:COTFFT>2.0.ZU;2-Z
Abstract
We are developing X-ray microcalorimeters using superconducting transition-
edge sensors (TESs), which can be operated at relatively high base temperat
ures of a He-3 cryostat. For this purpose, we have selected Ti films to be
used as TESs. The Ti films were deposited on different substrates by RF-spu
ttering. It was found that the superconducting properties of the Ti films d
epended on Ar pressure, film thickness, and substrate surface roughness. (C
) 1999 Elsevier Science B.V. All rights reserved.