CHARACTERISTICS OF MOLYBDENUM THIN-FILM PLATE OSCILLATORS FABRICATED BY MINIMUM DEFORMATION MICROMACHINING

Authors
MIYAZAKI K YAMAUCHI N HISAKI T TAKAHASHI R ITAO K
Citation
K. Miyazaki et al., CHARACTERISTICS OF MOLYBDENUM THIN-FILM PLATE OSCILLATORS FABRICATED BY MINIMUM DEFORMATION MICROMACHINING, International journal of the Japan Society for Precision Engineering, 31(1), 1997, pp. 53-54
Citations number
2
Categorie Soggetti
Engineering, Mechanical
Journal title
International journal of the Japan Society for Precision Engineering → ACNP
ISSN journal
0916782X
Volume
31
Issue
1
Year of publication
1997
Pages
53 - 54
Database
ISI
SICI code
0916-782X(1997)31:1<53:COMTPO>2.0.ZU;2-V