Dk. Wilkinson et al., Study of altered layer formation in O-2(+)-bombarded SiGe alloys using a novel crossed bevel technique, SURF INT AN, 27(9), 1999, pp. 840-848
A novel 'crossed bevel' technique has been used for the investigation of th
e evolution of the altered layer that forms in a SiGe alloy under 8 keV O-2
(+) ion bombardment. Auger microscopy (MULSAM instrument) and low-energy io
n beam bevelling (500 eV O-2(+)) Here used to composition-depth profile a h
igh-energy (8 keV O-2(+)) bevel that contained the complete history of the
altered layer. The sample was transferred in vacuo from the bevelling instr
ument to the Anger microscope, The formation of a Ge-rich layer 15 nm below
the altered layer surface, with an associated near-surface Ge depletion, w
as observed, consistent with previous measurements. The growth of a surface
oxygen implant was also seen, The importance of the development of this te
chnique is that it will enable the powerful multispectral chemometric capab
ility of the MULSAM instrument to be applied to altered layer redistributio
n in the future. Copyright (C) 1999 John Wiley & Sons, Ltd.