Root-mean-square impact parameters for K- and L-shell ionization by electro
ns with energies between 60 and 400 keV, and pertinent to energy dispersive
X-ray (EDX) analysis, are calculated for a wide range of atoms. Hartree-Fo
ck wave functions with relativistic corrections are used for the found stat
es and Hartree-Slater wave functions for continuum states. These impact par
ameters differ substantially from those given by widely used approximate fo
rmulas. Impact parameters for K- and L-shell ionization fall on a single cu
rve, suggesting that the impact parameters are a single-valued function of
the ionization threshold energy for a given incident beam energy. For the r
ange of incident beam energies considered, impact parameters for threshold
energies up to 45 keV are given in a parameterized form. (C) 1999 Elsevier
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