Consider a nontrivial smooth solution to a semilinear elliptic system of fi
rst order with smooth coefficients defined over an n-dimensional manifold.
Assume the operator has the strong unique continuation property. We show th
at the zero set of the solution is contained in a countable union of smooth
(n - 2)-dimensional submanifolds. Hence it is countably (n - 2)-rectifiabl
e and its Hausdorff dimension is at most n - 2. Moreover, it has locally fi
nite (n - 2)-dimensional Hausdorff measure. We show by example that every r
eal number between 0 and n - 2 actually occurs as the Hausdorff dimension (
for a suitable choice of operator). We also derive results for scalar ellip
tic equations of second order.