Surface reaction of trisdimethylaminoantimony on GaSb(100)

The decomposition of trisdimethylaminoantimony (TDMASb) on GaSb(100)-(3 x 1 ) was studied using temperature programmed desorption, temperature programm ed static secondary ion mass spectroscopy, low energy electron diffraction, and X-ray photoelectron spectroscopy. Multilayers of TDMASb desorb at 220 K. TDMASb decomposes on the surface at temperatures below 200 K and the dim ethylamino ligand desorbs through two reaction pathways, homolysis and beta -hydride elimination. Homolysis of the antimony-nitrogen bond resulted in d esorption of the dimethylamino radical at 380 K. Methylmethyleneimine was f ormed and desorbed from the surface through a beta-hydride elimination proc ess at 480 K. Deposition of Sb from five saturation exposures of TDMASb on GaSb(100) induced the change of surface structure from (3 x 1) to (1 x 1). Surface Sb atoms are proposed as reactive sites for the surface reaction of TDMASb on GaSb(100). (C) 1999 Elsevier Science B.V. All rights reserved.