Microstructure and crystallographic texture of reactively sputtered FeTaN films

X-ray pole figure analysis is used to measure the crystallographic texture of FeTaN as a function of nitrogen content. The pole figures an used to sem i-quantitatively describe the texture with the use of the orientation distr ibution function. The grain structure and texture is further analyzed with cross-sectional transmission electron microscopy. The preferred crystallogr aphic orientations are found to be mostly randomly oriented, except for fib er textures that range from a (111) for FeTa to a weak (110) for FeTaN. The effect of a Ti underlayer is also described which greatly enhances the (11 0) fiber texture in all of the films studied. (C) 1999 Elsevier Science S.A , All rights reserved.