Citation
Vp. Mammana et al., Porous freestanding diamond membranes with reduced pore diameter, THIN SOL FI, 353(1-2), 1999, pp. 239-243
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
THIN SOLID FILMS
ISSN journal
00406090
→ ACNP
Volume
353
Issue
1-2
Year of publication
1999
Pages
239 - 243
Database
ISI
SICI code
0040-6090(19990929)353:1-2<239:PFDMWR>2.0.ZU;2-Z
Abstract
We have shown previously that porous diamond membranes can be fabricated us
ing a method based on growing diamond on a patterned silicon substrate. The
technique used to pattern the silicon is conventional lithography. In this
work we present a method for reducing the pore size using diamond post-dep
osition over the membrane. An important concern in this work was to determi
ne the pore-shutting rate, considering the time post-deposition and the por
e morphology. (C) 1999 Elsevier Science S.A. All rights reserved.