Arrays of Si square dots down to 200 nm in size were patterned on silicon s
ubstrates, and thin films of different magnetic materials were sputter depo
sited on these patterned substrates. The magnetic film covers the top of th
e dots, the bottom of the grooves and to much less extent the sidewalls of
the dots. Single domain magnetic dots were obtained for Co/NiO bilayers and
Co/Pt multilayers, without significant direct coupling mediated by the mag
netic deposit on the sidewalls of the dots. Our results indicate that, in t
hese arrays, the magnetic pinning forces are stronger than the estimated va
lue of the largest demagnetizing magnetostatic field on each individual dot
. As a result, any magnetic configuration could in principle be stored in s
uch arrays. This approach seems therefore very promising for the preparatio
n of magnetic storage media with ultrahigh density. (C) 1999 American Insti
tute of Physics. [S0003-6951(99)01342-X].