Dielectric properties of metal-organic chemical vapor deposited highly textured Pb(ScTa)(1-x)TixO3 (x=0-0.3) relaxor ferroelectric thin films on LaNiO3 electrode buffered Si
Ch. Lin et al., Dielectric properties of metal-organic chemical vapor deposited highly textured Pb(ScTa)(1-x)TixO3 (x=0-0.3) relaxor ferroelectric thin films on LaNiO3 electrode buffered Si, APPL PHYS L, 75(16), 1999, pp. 2485-2487
Highly (100) textured Pb(ScTa)(1-x)TixO3 (x = 0-0.3) thin films were grown
on LaNiO3/Pt/Ti electrode-coated Si substrate using metal-organic chemical
vapor deposition at 685 degrees C. Ti addition was introduced to modify the
dielectric properties. Diffuse phase transition, typical of relaxor ferroe
lectrics was noticed. As Ti content increased from 0% to 30%, the phase tra
nsition temperature (T-max) gradually shifted from -10 to 120 degrees C wit
h the dielectric constant at T-max increased from 1397 to 1992 (1 kHz). Los
s tangent values are generally below 0.025. (C) 1999 American Institute of
Physics. [S0003-6951(99)05142-6].