For the first time Y2O3 has been deposited in the cubic equilibrium structu
re with a small particle size of 10 nm in a single processing step; the Fig
ure shows the XRD patterns with Bragg peaks consistent with the structure.
This communication shows that this good crystalline quality makes Y2O3 a pr
omising host material for doped nanocrystalline phosphorus with high effici
ency in lighting systems.