Arcing during PVD processes using d.c. glow discharges and the defects
formed at the substrate are a major drawback in the application of ha
rd wear- and corrosion-resistant coatings. This work focuses on a more
complete understanding: of the interrelationships between substrate a
rcing and surface quality of the coating. Intense substrate arcing and
the surface defect density were characterized using a current-Voltage
transformer and a quantitative image analysing system connected to an
optical microscope. The major defects formed during the etching proce
ss are craters and canyons resulting from arcs ignited between the sub
strate and the anode. During deposition the surface quality of the coa
ting is mainly determined by droplets ejected from the target due to a
rcing between target and anode. Optimization of the deposition paramet
er of argon pressure seems to be suitable to minimize the density of t
hese defects. (C) 1997 Elsevier Science S.A.