A NOVEL METHOD FOR INSIDE-COATING OF TUBES AND HOLLOW CYLINDERS BY ION-BEAM SPUTTERING

Authors
SCHUMACHER A FRECH G WOLF GK
Citation
A. Schumacher et al., A NOVEL METHOD FOR INSIDE-COATING OF TUBES AND HOLLOW CYLINDERS BY ION-BEAM SPUTTERING, Surface & coatings technology, 89(3), 1997, pp. 258-261
Citations number
9
Categorie Soggetti
Materials Science, Coatings & Films
Journal title
Surface & coatings technology → ACNP
ISSN journal
02578972
Volume
89
Issue
3
Year of publication
1997
Pages
258 - 261
Database
ISI
SICI code
0257-8972(1997)89:3<258:ANMFIO>2.0.ZU;2-T
Abstract
A novel method for inner wall coating of tubes and hollow cylinders wa s developed and tested. A 60-keV focused Ar+ ion beam is directed into a target chamber. The ions hit under 60 degrees impact angle on a mov eable target fixed inside a tube or hollow cylinder. The target partic les are sputtered off and deposited on the inner surface of the tube. The apparatus and first results with Cu and Ti depositions are describ ed. Special attention is given to the uniformity and composition of th e coatings. (C) 1997 Elsevier Science S.A.