ANALYSIS OF VAPORIZATION KINETICS OF GROUP-III NITRIDES

On the basis of experimental data on Knudsen and Langmuir evaporation of group-III nitrides, the role of surface kinetics is analyzed. Diffe rent behavior of nitrides compared with other III-V compounds is assum ed to originate from the existence of a significant kinetic barrier fo r adsorption/desorption of molecular nitrogen. Thermodynamic propertie s of GaN, AlN and InN are refined and evaporation/condensation coeffic ients of these compounds are obtained as functions of temperature. The trends in nitrides vaporization are analyzed using a model accounting for the kinetics of the evaporation process. The theoretical predicti ons are compared with those available in the literature experimental d ata.