Fabrication of double rectangular type FeTaN film inductors

A double rectangular spiral inductor is fabricated using FeTaN films. The i nductor is composed of internal coils sandwiched by magnetic layers. Charac teristics of inductor performance are investigated with an emphasis on plan arization of magnetic films. In the absence of the planarizaton process, th e grating topology of upper magnetic films over coil arrays degrades the so ft magnetic properties and the inductor performance. It also induces a unia xial magnetic anisotropy with the easy axis aligned to the magnetic flux di rection. This alignment prevents the upper magnetic films from contributing to the total induction. Glass bonding is a viable method for achieving a c ompletely planar inductor structure. The planar inductor with glass bonding shows excellent performance : inductance of 1.1 mu H, Q factor of 7 (at 5 MHz), and the de current capability up to 100 mA.