New micromachined inductors on silicon substrates

Microinductors with two layer vertically stacked spiral; type copper conduc tor lines and permalloy core have been fabricated, characterized, and compa red using micromachining techniques. In this research, micromachined induct ors with vertically laminated magnetic alloy cores are found to have better high frequency characteristics such as high inductance, high quality facto r, and low ac resistance resulting in low magnetic core losses at high freq uencies, than non-laminated types.