This paper describes a micro-actuator for high-bandwidth tracking servo, wh
ere a microactuator is attached between slider and suspension, and moves th
e slider relative to the suspension, The micro-actuator frequency response
measurement proved that this micro-actuator can be modeled as an ideal spri
ng-mass-damper system up to 80 kHz, so that very high bandwidth servo Syste
m can be easily designed. The maximum servo bandwidth of 6.4 kHz; was achie
ved in a drive level experiment, which is the highest bandwidth ever demons
trated as a drive level. A rapid step response time of 0.2 mS for 0.6 mu m
step was also achieved. The experimental bandwidth was not limited by the m
icro-actuator's resonance mode, but the saturation of the micro-actuator dr
iver.