M. Takezawa et al., Integration of high-frequency carrier-type thin-film magnetic field sensorwith SmCo thin-film bias magnet, IEEE MAGNET, 35(5), 1999, pp. 3682-3684
A bridge-connected high-frequency carrier-type thin-film magnetic field sen
sor is fabricated on a SmCo magnetic thin-him which provides an in-plane de
bias magnetic field to the sensor. The de bias field of 320 A/m was achiev
ed by using a 3 mu m thick SmCo underlayer. The sensitivity obtained was 8.
4 mV/Oe which was 12 Limes as large as the sensitivity without the SmCo thi
n-film magnet.