Novel measurements of flying height and attitudes using Michelson laser interferometry

Applications of the Michelson laser interferometry to the measurement of he ad-disk spacing were presented. This method utilized the phase comparison o f two kinds of fringe patterns formed over slider and disk surfaces simulta neously based on the Michelson interferometry, One of the applications was a measurement of spacing variations of heads while sliding in contact with actual disks. As an extended application, a flying height measurement throu gh glass disks was demonstrated.