Tribological characteristics of SiNx films

The tribological performance and chemical compositions of thick (75nm-120nm ) amorphous SiNx films are studied with CSS testers and XPS. A high-speed H /D contact program is used to provide intermittent head/disc contacts. Film s with high Si/N ratio (1.25) and high oxygen concentration (22%) have the best durability. Films' durability is also affected by the sputtering condi tions used to prepare films. Higher N-2/Ar ratio will produce lower durabil ity film. The film durability is not sensitive to the total pressure and sp uttering power in the range of 5-15 mTorr and 1-4 kWatt.