The effect of smaller crater laser bumps on stiction performance was invest
igated in this paper. A Nd-YVO4 laser and a green laser were employed to ge
nerate crater laser bumps on NiP/AlMg substrates. A stiction map for three
different bump diameters was made to depict high stiction and normal sticti
on regions. It shows that smaller bump diameter is a good approach to meet
both low stiction and low glide requirements. This is attributed to the red
uction in radius of curvature at the top of the laser bump rim. A novel til
ted crater laser bump providing good wear durability and low stiction was a
lso evaluated.