Measurement of the momentum of particles target-emitted during ion-plasma sputtering

Authors
Grigoriev, AB Marchenko, VA
Citation
Ab. Grigoriev et Va. Marchenko, Measurement of the momentum of particles target-emitted during ion-plasma sputtering, INSTR EXP R, 42(5), 1999, pp. 716-717
Citations number
4
Categorie Soggetti
Instrumentation & Measurement
Journal title
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES
ISSN journal
00204412 → ACNP
Volume
42
Issue
5
Year of publication
1999
Pages
716 - 717
Database
ISI
SICI code
0020-4412(199909/10)42:5<716:MOTMOP>2.0.ZU;2-S
Abstract
Features on how to use a microbalance for measuring the momentum of cathode -reflected gas atoms are described. A microbalance can be manufactured on t he basis of a microammeter. The contributions of various forces arising in a magnetron discharge are evaluated.