The primacy engineering function of electronic materials is the control of
electric charge for some useful purpose, rather than any mechanical load ca
rrying function. However, mechanical stress and its consequences are centra
l factors in the fabrication, performance and reliability of microelectroni
c devices, broadly affecting one of the largest industries in the world. He
re, attention is focused on the role of stress in the fabrication of semico
nductor heterostructures. Particular attention is devoted to strain relaxat
ion by dislocation formation and interaction, stress-driven surface morphol
ogy evolution, and the influence of strain on electronic transport characte
ristics in quantum structures relevant to the next generation of devices. (
C) 1999 Elsevier Science Ltd. All rights reserved.