We have Fabricated overdamped NbN Josephson junctions based on Nb/AlOx/Nb t
rilayer technology. The junctions have the structure of NbN/Nb/AlOx/Nb/NbN,
where Nb/AlOx/Nb acts as a junction barrier. The overdamped junctions show
ed a critical current density J(c) and characteristic voltage as high as 0.
44 kA/cm(2) and 160 mu V at 10 K, respectively. The junction characteristic
s at 4.2 K were investigated from the viewpoint of their dependence on the
film thickness of the Nb layers. The junction uniformity was also evaluated
. The standard deviation, 1 - sigma, was 2.1% for a series of 64 5 x 5 mu m
(2) junctions at 4.2 K.