Formation of patterned microstructures of polycrystalline ceramics from precursor polymers using micromolding in capillaries

Micromolding in capillaries has been used to generate patterned microstruct ures of ZrO2 or SnO2 from its polymeric precursor. After patterning, the am orphous precursor was converted into the desired polycrystalline ceramic ma terial by calcination in air at 460 degrees C. The final phase for each cer amic material was determined by powder x-ray diffraction, The shrinkage of the precursor material during pyrolysis was investigated by scanning electr on microscopy and atomic force microscopy. These ceramic microstructures co uld be either supported on solid substrates or released as freestanding fib ers and membranes. Their lateral dimensions could be as small as approximat ely 500 nm.