We report that the rate of excimer-laser-induced densification is a strong
function of composition in the binary metal-oxide-silica system. The pulsed
excimer-laser-induced densification rate is shown to increase with metal-o
xide content. A good correlation was found between the densification rate a
nd the relative softness of the glass, as indicated by the annealing temper
ature. : The densification rate for all the glasses was also found to be a
strong function of the excimer-laser wavelength in the order 157 nm > 193 n
m > 248 nm. (C) 1999 Optical Society of America OCIS codes: 140.3390, 160.2
750, 160.4760.