The problem of self-compensation of charged dopants is analyzed. Special em
phasis is given to dopants in binary oxides. It is shown that one can deter
mine the degree of self-compensation from the properties of the host materi
al and dopant concentration alone. It is further shown that for a native p-
type semiconductor, donors are compensated, mostly, by native ionic defects
. On the other hand, doping with accepters allows us to increase significan
tly the hole concentration, i.e., self-compensation is low under high dopin
g levels. For a native n-type semiconductor the opposite is true, namely, e
xtrinsic accepters are mainly compensated by native ionic defects. It is sh
own that the changes in concentration of all the charged defects are simply
related by a single factor, the doping factor f, or its power f(k) where k
depends solely on the defect's charge. Quantitative calculations off and d
efect concentrations are presented for Cu2O, which was used as a model mate
rial. It is found that for p-type Cu2O doping with donors results in f with
in the range of 1-10, depending on the dopant concentration and P(O-2). Thi
s means that the hole concentration decreases and the electron concentratio
n increases at most by a factor of 10. Therefore one does not expect to obt
ain a changeover from p- to n-type cuprous oxide by doping, under equilibri
um conditions. Most of the donors are compensated by negative ionic defects
. Self-compensation in the presence of amphoteric defects and Fermi level s
tabilization are discussed, using the former formalism. [S0163-1829(99)1133
5-3].